MPO Coating Technology
MPO – Micro Plasma Oxidation
The Surface Modification technology use in exposure stage.
We development the Ceramic coating technology for Aluminum Alloy material.
Advantage:
- Corrosion resistance
- Erosion resistance
- High UV durability
- High impedance and Electric insulator
- Low ESD
Application Field:
- Lithography Vacuum Chuck coating
- CVD, PECVD, PVD process
- The Space and Aviation industry Bio and Medical Technology Electronics and Optics
Feature
- Customized parts development for Corp. Client and Success development for variable High-Tech process.
- Process improvement, Parts life time extend, reduce EQ Down time. To increase process Stage coating, Vacuum chuck coating.