MPO Coating Technology

MPO – Micro Plasma Oxidation
The Surface Modification technology use in exposure stage.

We development the Ceramic coating technology for Aluminum Alloy material.


  1. Corrosion resistance
  2. Erosion resistance
  3. High UV durability
  4. High impedance and Electric insulator
  5. Low ESD

Application Field:

  1. Lithography Vacuum Chuck coating
  2. CVD, PECVD, PVD process
  3. The Space and Aviation industry Bio and Medical Technology Electronics and Optics


  1. Customized parts development for Corp. Client and Success development for variable High-Tech process.
  2. Process improvement, Parts life time extend, reduce EQ Down time. To increase process Stage coating, Vacuum chuck coating.